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Form class for a substrate and a feature and functions for operating on it
Calculates the scattering resulting from the shape profile of individual features. This also calculates the scattering that results from the layers of the substrate. All calculation in this module are in the Born Approximation and for shapes that are parallelapiped.
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Substrate This contains variables to define a substrate |
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Parallelapiped This contains variables to define a feature |
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